| 000 | 00406nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230326s9999 xx 000 0 und d | ||
| 020 | _a195681444 | ||
| 082 |
_a621.38152 _bCAM |
||
| 100 | _aCampbell, Stephen A. | ||
| 245 | 0 | _aScience And Engineering Of Microelectronic Fabrication | |
| 250 | _a2nd | ||
| 260 |
_a _bOxford University Press _c2008 |
||
| 300 | _a603 p. | ||
| 365 | _b375 | ||
| 650 |
_a _a |
||
| 999 |
_c9992 _d9992 |
||