| 000 | 00352nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 230326s9999 xx 000 0 und d | ||
| 020 | _a0 | ||
| 082 |
_a621.3815 _bHEL |
||
| 100 | _aHelbert, John | ||
| 245 | 0 | _aHandbook Of Vlsi Microlightography: Principles Tool,Technolo | |
| 260 |
_a _bJaico Publishing house _c2009 |
||
| 365 | _b795 | ||
| 650 |
_a _a |
||
| 999 |
_c13134 _d13134 |
||