Campbell, Stephen A.  <br/><br/>
Science And Engineering Of Microelectronic Fabrication  

 - 2nd  
 -  Oxford University Press   2008 
 - 603 p.  
<br/><br/><label>ISBN: </label>195681444 
<br/><br/><label>Subjects--Topical Terms: </label><br/><br/>
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM