TY  - BOOK
AU  - Maluf, Nadim.,  Williams, Kirt .
AU  - Williams, Kirt 
TI  - Introduction to microelectromechanical systems engineering 
SN  - 9781580535908
U1  - 621.381 
PY  - 2004///
CY  - New Delhi
PB  - Artech House, Inc. 
ER  -