Maluf, Nadim.,  Williams, Kirt . <br/><br/>
Introduction to microelectromechanical systems engineering  

 - 2nd  
 - New Delhi;  Artech House, Inc.   2004 
<br/><br/><label>ISBN: </label>9781580535908 
<br/><br/><label>Dewey Class. No.: </label>621.381  / MAL